Experimental PVD system

Introduction of STN-500A(Download, PDF, 78K)

Inner size of the chamber --- Diameter: 400~600mm；Height：400mm~600mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC
Ionization source & Bias power supply --- Number. of targets:1~2;Power of BIAS: 5kW~10kW

The STN-500A has been specially designed for small volume products tools & decorative coating.
For small volume products the STN-500A offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.
The STN-500AT has been specially designed for tools coating of small volume products.
For small volume products the STN-500AT offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.
Specification
Model	STN-500A		STN-500AT
Process Chamber	φ500mm*H500mm		φ550*H600mm
Pumping System
Backing Pump	Rotary vane pump with 108m3/h
Diffusion Pump	Oil diffusion pump with 7200m3/h *A
System Control	PLC control
Cathodes	2 unit		3 unit (optional)
Cathodes Power	Max 160A
Bias Power Supply	15KW,0-600V
Process Gas System
500sccm	3 unit		2 unit
1000sccm	-		1 unit
Heating System	0-6KW , PID contol
Power	380V three phase four line
Turntable
Driving System	3unit,rotation,revolution
Driving Control	0-18rpm (variable)
Cooling Water System	PL-05 (optional)
Oven	8KW,800*800*1000mm (optional)
*A: STN-500A can also equipped with molecular pump with pumping speed 600 L /s; and for STN-500AT with turbo molecular pump with pumping speed 1500 L /s