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Experimental PVD system

Introduction of STN-500A(Download, PDF, 78K)

Inner size of the chamber --- Diameter: 400~600mm;Height:400mm~600mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC
Ionization source & Bias power supply --- Number. of targets:1~2;Power of BIAS: 5kW~10kW

The STN-500A has been specially designed for small volume products tools & decorative coating.

For small volume products the STN-500A offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.

The STN-500AT has been specially designed for tools coating of small volume products.

For small volume products the STN-500AT offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.

Specification
Model
STN-500A
STN-500AT
Process Chamber
φ500mm*H500mm
φ550*H600mm
Pumping System
 
Backing Pump
Rotary vane pump with 108m3/h
Diffusion Pump
Oil diffusion pump with 7200m3/h *A
System Control
PLC control
Cathodes
2 unit
3 unit (optional)
Cathodes Power
Max 160A
Bias Power Supply
15KW,0-600V
Process Gas System
 
500sccm
3 unit
2 unit
1000sccm
-
1 unit
Heating System
0-6KW , PID contol
Power
380V three phase four line
Turntable
 
Driving System
3unit,rotation,revolution
Driving Control
0-18rpm (variable)
Cooling Water System
PL-05 (optional)
Oven
8KW,800*800*1000mm (optional)
*A: STN-500A can also equipped with molecular pump with pumping speed 600 L /s; and for STN-500AT with turbo molecular pump with pumping speed 1500 L /s

 

 

 

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ZHONGSHAN CITY, GUANGDONG,CHINA.
Tel: (86)-760-85598027
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