Small-scale PVD system

Introduction of STN-4B6(Download, PDF, 80K)

Inner size of the chamber --- Diameter: 600~800mm; Height: 600mm~1000mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply --- Number of targets: 4~8; Power of BIAS: 10kW~20kW

The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.
The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.
The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.
Specification
Model	STN-4B6
Process Chamber	φ800mm*H800mm
Pumping System
Backing Pump	Rotary vane pump with 108m3/h
Roots Pump	Roots pump with 1080m3/h
Diffusion Pump	Oil diffusion pump with 28080m3/h
Hold Pump	Rotary vane pump with 54L/s
System Control	PLC touch screen
Cathodes	6 unit
Cathodes Power	Max 160A
Bias Power Supply	30KW,0-1000V
Process Gas System
500sccm	2 unit
1000sccm	2 unit
Heating System	0-12KW , PID contol
Power	380V three phase four line
Turntable
Driving System	6*4unit,rotation,revolution
Driving Control	0-18rpm (variable)
Cooling Water System	PL-08 (optional)
Oven	8KW,800*800*1000mm (optional)