Large-scale PVD system

Introduction of STN-20D30(Download, PDF, 81K)

Inner size of the chamber --- Diameter: 1500~1800mm；Height: 2000mm~3500mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC
Ionization source & Bias power supply --- No. of targets:16~26;Power of BIAS: 30kW~45kW

The proposed coating system is the PVD COATING SYSTEM TYPE STN-20D30. The STN-20D30 has an enlarged loading capacity and has been specially designed for large volume products decorative coating.
For large volume products the STN-20D30 offers an unsurpassed productivity. This equipment is especially developed for those applications requiring extreme large coating space, high loading capacity, low temperatures (<300℃) and short cycle times. This makes this system especially well suited for decorative parts.
The vacuum chamber unit has a cylinder design with one door opened on the top of the process chamber and 26 (twenty-six) cathode Arc Ion Sources.
Specification
Model	STN-20FD30
Process Chamber	φ1800mm*H3500mm
Pumping System
Backing Pump	Rotary vane pump with 252m3/h (4 set)
Roots Pump	Roots pump with 1080m3/h (2 set)
Diffusion Pump	Oil diffusion pump with 81000m3/h (2 set)
Hold Pump	Rotary vane pump with 108m3/h (2 set)
System Control	PLC touch screen & PC control
Cathodes	26 unit
Cathodes Power	Max 160A
Bias Power Supply	180KW,0-1000V
Process Gas System
500sccm	2 unit
1000sccm	2 unit
Heating System	0-24KW , PID contol
Power	380V three phase four line
Turntable
Driving System	6*4unit,rotation,revolution
Driving Control	0-18rpm (variable)
Cooling Water System	PL-08 (optional)
Oven	8KW,800*800*1000mm (optional)