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Middle-scale PVD system

设备Introduction of STN-10FD30(Download, PDF, 80K)

Inner size of the chamber ----- Diameter:1000~1250mm;Height: 1250mm~1500mm
Vacuum pumping system ----- Oil diffusion pump + Root's pump + Rotary pump
Controlling system -------- PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply ----- Number of targets:10~14; Power of BIAS: 15kW~30kW

The STN-10 Series coating system was specially designed for large products decorative coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 12 or 14 cathode Arc Ion Sources.

The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.

For the required golden color the system is provided with Titanium targets and Zirconium targets, also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process.

The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.

Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability.

Specification
Model
STN-10D
STN-10FD30
Process Chamber
φ1000mm*H1500mm
φ1250*H1500mm
Pumping System
 
Backing Pump
Rotary vane pump with 252m3/h
Roots Pump
Roots pump with 1080m3/h
Diffusion Pump
Oil diffusion pump with 45000m3/h
Hold Pump
Rotary vane pump with 108m3/h
System Control
PLC touch screen control
Cathodes
10 unit
14 unit (optional)
Cathodes Power
Max 160A
Bias Power Supply
30KW,0-1000V
Process Gas System
 
500sccm
2 unit
1000sccm
2 unit
Heating System
0-18KW , PID contol
Power
380V three phase four line
Turntable
 
Driving System
6*4unit,rotation,revolution
Driving Control
0-18rpm (variable)
Cooling Water System
PL-05 (optional)
PL-08 (optional)
Oven
8KW,800*800*1000mm (optional)

 

 

 

 

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ZHONGSHAN CITY, GUANGDONG,CHINA.
Tel: (86)-760-85598027
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