Middle-scale PVD system

Introduction of STN-10FD30(Download, PDF, 80K)

Inner size of the chamber ----- Diameter:1000~1250mm；Height: 1250mm~1500mm
Vacuum pumping system ----- Oil diffusion pump + Root's pump + Rotary pump
Controlling system -------- PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply ----- Number of targets:10~14; Power of BIAS: 15kW~30kW

The STN-10 Series coating system was specially designed for large products decorative coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 12 or 14 cathode Arc Ion Sources.
The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.
For the required golden color the system is provided with Titanium targets and Zirconium targets, also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process.
The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.
Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability.
Specification
Model	STN-10D		STN-10FD30
Process Chamber	φ1000mm*H1500mm		φ1250*H1500mm
Pumping System
Backing Pump	Rotary vane pump with 252m3/h
Roots Pump	Roots pump with 1080m3/h
Diffusion Pump	Oil diffusion pump with 45000m3/h
Hold Pump	Rotary vane pump with 108m3/h
System Control	PLC touch screen control
Cathodes	10 unit		14 unit (optional)
Cathodes Power	Max 160A
Bias Power Supply	30KW,0-1000V
Process Gas System
500sccm	2 unit
1000sccm	2 unit
Heating System	0-18KW , PID contol
Power	380V three phase four line
Turntable
Driving System	6*4unit,rotation,revolution
Driving Control	0-18rpm (variable)
Cooling Water System	PL-05 (optional)		PL-08 (optional)
Oven	8KW,800*800*1000mm (optional)